DATASET
1. CFM_DATA_SENSOR1_(C12880MA).xlsx (158.55 kB)
DATASET
2. CFM_DATA_SENSOR2_(C12666MA).xlsx (200.28 kB)
DATASET
3. CFM_DATA_SENSOR2_(HAL_and_DEUT).xlsx (109.28 kB)
DATASET
4. IIM_and_Reflectance_curve_model.xlsx (167.3 kB)
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Dataset: A Spectroscopic Reflectance-Based Low-Cost Thickness Measurement System for Thin Films: Development and Testing
dataset
posted on 2023-06-04, 13:01 authored by Nestor Sanchez ArriagaNestor Sanchez Arriaga, Divya TiwariDivya Tiwari, Windo HutabaratWindo Hutabarat, Adrian Leyland, Ashutosh TiwariAshutosh TiwariThis data repository contains the following information related to the Article: "A Spectroscopic Reflectance-Based Low-Cost Thickness Measurement System for Thin Films: Development and Testing"
File 1: RMSE and MSE calculation for SENSOR1
File 2: RMSE and MSE calculation for SENSOR2
File 3: RMSE and MSE calculation for SENSOR2 using HAL/DEUT light source
File 4: Interference Interval Method Calculation and Reflectance Curve Modelling
Funding
EPSRC NetworkPlus In Digitalised Surface Manufacturing: Towards "World's Best" Processes
Engineering and Physical Sciences Research Council
Find out more...Intelligent engineering coatings for in-manufacture and in-service monitoring of critical safety products (CoatIN)
Engineering and Physical Sciences Research Council
Find out more...Consejo Nacional de Ciencia y Tecnología (CONACYT—México) (CVU: 1059795)
History
Ethics
- There is no personal data or any that requires ethical approval
Policy
- The data complies with the institution and funders' policies on access and sharing
Sharing and access restrictions
- The data can be shared openly
Data description
- The file formats are open or commonly used
Methodology, headings and units
- Headings and units are explained in the files
